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Nuclear microprobe analysis of implantation damage induced by focused gallium ion beams in GaAs

โœ Scribed by M. Takai; S. Hara; T. Kishimoto; J. Yanagisawa


Book ID
113286613
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
323 KB
Volume
104
Category
Article
ISSN
0168-583X

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โœ S.W. Hwang; H.J. Lezec; T. Sakamoto; K. Nakamura ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 138 KB

We report evidence of single electron tunneling at \(77 \mathrm{~K}\) in \(\mathrm{GaAs} / \mathrm{AlGaAs}\) heterostructures implanted with a single line scan of a focused ion beam (FIB). We observe clear staircases in the current-voltage characteristics when the current is measured across the impl