In-situ ion-beam annealing of damage in GaAs during O implantation and O-site determination by 18O(p,α) 15N nuclear reaction

✍ Scribed by Jyoji Nakata; Hajime Yamazaki; Yasukazu Yamamoto; Yoshiaki Kido

• Book ID: 114168309
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 478 KB
• Volume: 121
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00382-5