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Magnetron sputtering of YBaCuO target: Effects of discharge voltage and deposition rate variation

โœ Scribed by Yu. N. Drozdov; D. V. Masterov; S. A. Pavlov; A. E. Parafin


Book ID
111448405
Publisher
Springer
Year
2009
Tongue
English
Weight
183 KB
Volume
54
Category
Article
ISSN
1063-7842

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