𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The effects of gas composition on discharge and deposition characteristics when magnetron sputtering aluminium

✍ Scribed by AR Nyaiesh; L Holland

Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
468 KB
Volume
31
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Influence of Ar–N2 gas composition on th
Influence of Ar–N2 gas composition on the magnetron-sputter deposition of cubic boron nitride films
✍ Sven Ulrich; Jian Ye; Michael StΓΌber πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 244 KB

Thin films of cubic boron nitride (c-BN) can be produced by various PVD and PECVD techniques under several prerequisites referring reportedly to the growth temperature, stoichiometry of the deposited films, and energy impact of the growing surface during film deposition. For reactive magnetron-sputt