5294. The effects of gas composition on discharge and deposition characteristics when magnetron sputtering aluminium: A R Nyaish and L Holland, Vacuum, 31 (8–9), 1981, 371–375

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 154 KB
• Volume: 32
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(82)93890-8