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Effects of capacitively-coupled radio-frequency discharge on operation voltage in magnetron sputtering

โœ Scribed by Chunzhi Gong; Xiubo Tian; Muqin Li; Shiqin Yang; Ricky K.Y. Fu; Paul K. Chu

Book ID
108278545
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
717 KB
Volume
203
Category
Article
ISSN
0257-8972

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