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Magnetron sputter deposition of (SiC)1−x(AlN)xsolid solution films

✍ Scribed by M. K. Guseinov; M. K. Kurbanov; G. K. Safaraliev; B. A. Bilalov

Book ID
110141364
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
35 KB
Volume
31
Category
Article
ISSN
1063-7850

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Magnetron sputtering system stabilisatio
Magnetron sputtering system stabilisation for high rate deposition of AlN films
✍ Alexey A Fomin; Vladislav Akhmatov; Sergey V Selishchev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 574 KB

The stabilisation of a planar magnetron sputtering system for reactive sputtering ofAlN in a gaseous mixture ofAr and highly active NH, was examined. The helical instability in the cathode plasma sheath was observed and methods for its damping were proposed. It was found that the deposition oft-axis