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Magnetron-assisted deposition of thin (SiC)1-x(AlN)xalloy films

✍ Scribed by M. K. Gusejnov; M. K. Kurbanov; B. A. Bilalov; G. K. Safaraliev

Book ID
111444659
Publisher
Springer
Year
2010
Tongue
English
Weight
178 KB
Volume
44
Category
Article
ISSN
1063-7826

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al