✦ LIBER ✦

Low temperature plasma enhanced chemical vapor deposition of silicon oxide films using disilane and nitrous oxide

✍ Scribed by Juho Song; G. S. Lee; P. K. Ajmera

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Polycrystalline silicon–germanium films

✍ Tsai, Julie A.; Reif, Rafael 📂 Article 📅 1995 🏛 American Institute of Physics 🌐 English ⚖ 399 KB

Mass spectroscopy in plasma-enhanced che

✍ Y Inoue; O Takai 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 215 KB

Hot-filament-enhanced chemical vapor dep

✍ F Chávez; Y.E Bravo-Garcı́a; F Silva-Andrade; A Galindo 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 143 KB

Nanoindentation creep of plasma-enhanced

✍ Zhiqiang Cao; Xin Zhang 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 424 KB

Deposition of silicon oxide, nitride and

✍ Gerald Lucovsky; David V. Tsu 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 461 KB

Plasma enhanced chemical vapor depositio

✍ M.S. Kang; T.H. Chung; Y. Kim 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 187 KB