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Hot-filament-enhanced chemical vapor deposition of silicon oxide films

✍ Scribed by F Chávez; Y.E Bravo-Garcı́a; F Silva-Andrade; A Galindo


Book ID
117358943
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
143 KB
Volume
43
Category
Article
ISSN
0167-577X

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