Smooth diamond films grown by hot filament chemical vapor deposition on positively biased silicon substrates

✍ Scribed by C.H. Chao; G. Popovici; E.J. Charlson; E.M. Charlson; J.M. Meese; M.A. Prelas

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 362 KB
• Volume: 140
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90328-x