Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition

✍ Scribed by M. V. Baidakova; A. Ya. Vul’; V. G. Golubev; S. A. Grudinkin; V. G. Melekhin; N. A. Feoktistov; A. Krüger

• Book ID: 110131511
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 255 KB
• Volume: 36
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1485657