✦ LIBER ✦

Low-temperature PECVD of silicon dioxide on polymeric hydrogels

✍ Scribed by G. Suchaneck; M. Guenther; J. Sorber; G. Gerlach; K.-F. Arndt; B. Wolf

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On the structure of low-temperature PECV

✍ R. A. B. Devine 📂 Article 📅 1990 🏛 Springer US 🌐 English ⚖ 326 KB

Silicon dioxide deposited by ECR-PECVD f

✍ A. Pecora; L. Maiolo; A. Bonfiglietti; M. Cuscunà; F. Mecarini; L. Mariucci; G. 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 202 KB

Improvement in dielectric properties of

✍ K. W. Vogt; M. Houston; M. F. Ceiler; C. E. Roberts; P. A. Kohl 📂 Article 📅 1995 🏛 Springer US 🌐 English ⚖ 485 KB

Post-deposition processing of low temper

✍ M.S Haque; H.A Naseem; W.D Brown 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 193 KB

Temperature accelerated dielectric break

✍ H. Zhou; F.G. Shi; B. Zhao; J. Yota 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 488 KB

Reaction pathways and sources of OH grou

✍ J. A. Theil; D. V. Tsu; G. Lucovsky 📂 Article 📅 1990 🏛 Springer US 🌐 English ⚖ 892 KB