✦ LIBER ✦
Reaction pathways and sources of OH groups in low temperature remote PECVD silicon dioxide thin films
✍ Scribed by J. A. Theil; D. V. Tsu; G. Lucovsky
- Book ID
- 112812111
- Publisher
- Springer US
- Year
- 1990
- Tongue
- English
- Weight
- 892 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0361-5235
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