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Low-temperature growth of silicon epitaxial layers codoped with erbium and oxygen atoms

✍ Scribed by D. V. Shengurov, V. Yu. Chalkov, S. A. Denisov, V. G. Shengurov…

Book ID: 120808718
Publisher: Springer
Year: 2013
Tongue: English
Weight: 413 KB
Volume: 47
Category: Article
ISSN: 1063-7826
DOI: 10.1134/S1063782613030251

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