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Low temperature Ga2O3 atomic layer deposition using gallium tri-isopropoxide and water

✍ Scribed by Choi, Dong-won; Chung, Kwun-Bum; Park, Jin-Seong

Book ID: 123292443
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 914 KB
Volume: 546
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.03.066

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