✦ LIBER ✦
Zirconium-assisted reaction in low temperature atomic layer deposition using Bis(ethyl-methyl-amino)silane and water
✍ Scribed by Seok-Jun Won; Joon Rae Kim; Sungin Suh; Yu Jin Choi; Hyeong Joon Kim
- Book ID
- 116244464
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 388 KB
- Volume
- 257
- Category
- Article
- ISSN
- 0169-4332
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