Low temperature deposition: Properties of SiO 2 films from TEOS and ozone by APCVD system

✍ Scribed by Juárez, H; Pacio, M; Díaz, T; Rosendo, E; Garcia, G; García, A; Mora, F; Escalante, G

• Book ID: 121251471
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 402 KB
• Volume: 167
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/167/1/012020