Low temperature CVD garnet growth
β Scribed by M.E. Cowher; T.O. Sedgwick
- Book ID
- 107789070
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 381 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0022-0248
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## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogenβbased gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea