✦ LIBER ✦

Low-pressure chemical vapor deposition of titanium and zirconium carbonitride thin films from M(NEt2)4 (M = Ti and Zr)

✍ Scribed by Chiu Hsin-Tien; Huang Cheng-Chung

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation and electrical properties of

✍ K. Tominaga; Y. Sakashita; H. Nakashima; M. Okada 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 545 KB

Kinetics and modeling of low pressure ch

✍ I.-M. Lee; W.-C. Wang; G.W. Neudeck; C.G. Takoudis 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 397 KB

Synthesis of thin films by atmospheric p

✍ Fix, Renaud M.; Gordon, Roy G.; Hoffman, David M. 📂 Article 📅 1990 🏛 American Chemical Society 🌐 English ⚖ 894 KB

Growth kinetics and properties of dielec

✍ Roland A. Levy; James M. Grow 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 972 KB

ChemInform Abstract: Barrier Properties

✍ C. FALTERMEIER; C. GOLDBERG; M. JONES; A. UPHAM; D. MANGER; G. PETERSON; J. LAU; 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 33 KB 👁 2 views

ChemInform Abstract: Deposition of Cadmi

✍ M. CHUNGGAZE; M. A. MALIK; P. O'BRIEN 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 32 KB 👁 2 views