✦ LIBER ✦

Growth kinetics and properties of dielectric films synthesized by low pressure chemical vapor deposition from diethylsilane

✍ Scribed by Roland A. Levy; James M. Grow

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth and characterization of Al2O3 gat

✍ Qi-Yue Shao; Ai-Dong Li; Hui-Qin Ling; Di Wu; Yuan Wang; Yan Feng; Sen-Zu Yang; 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 226 KB

Growth of ZnO films by low-pressure orga

✍ Kenkichiro Kobayashi; Toshihiro Matsubara; Shigenori Matsushima; Gengi Okada 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 154 KB

Effect of water vapor on the growth of a

✍ J.S. Kim; H.A. Marzouk; P.J. Reucroft; J.D. Robertson; C.E. Hamrin Jr. 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 883 KB

Selective low pressure chemical vapour d

✍ H. Ko¨rner 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 841 KB

Silicon nitride films deposited from SiH

✍ S.-L. Zhang; J.-T. Wang; W. Kaplan; M. Östling 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 881 KB

Kinetics and modeling of low pressure ch

✍ I.-M. Lee; W.-C. Wang; G.W. Neudeck; C.G. Takoudis 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 397 KB