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Growth of ZnO films by low-pressure organometallic chemical vapor deposition

✍ Scribed by Kenkichiro Kobayashi; Toshihiro Matsubara; Shigenori Matsushima; Gengi Okada

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 154 KB
Volume: 235
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90235-h

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