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Low cost, rapid fabrication of durable molds of grating arrays for nanoimprint lithography

โœ Scribed by Hsun-Yuan Li; Chia-Wei Chen; Huang-Chin Yang; Lai-Kwan Chau; Wen-Hsin Hsieh


Book ID
113797847
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
720 KB
Volume
88
Category
Article
ISSN
0167-9317

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