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Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds

✍ Scribed by Lim, Hyungjun; Ryu, Jihyeong; Kim, Geehong; Choi, Kee-Bong; Lee, Sunghwi; Lee, Jaejong

Book ID: 120579702
Publisher: Royal Society of Chemistry
Year: 2013
Tongue: English
Weight: 589 KB
Volume: 13
Category: Article
ISSN: 1473-0197
DOI: 10.1039/C3LC50202C

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