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Fabrication of three-dimensional nanoimprint mold using inorganic resist in low accelerating voltage electron beam lithography

✍ Scribed by Yoshiaki Ishii; Jun Taniguchi

Book ID: 108207728
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 435 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.133

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