Advanced lithography for compound semico
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J. Weixlberger; P. Lindner
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Article
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2002
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Elsevier Science
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English
⚖ 222 KB
This paper focuses on state-of-the-art lithography technology for advanced applications in compound semiconductor material processing. The need for thinned substrate materials in high frequency as well as power devices creates new challenges in the handling of extremely fragile and costly substrates