X-ray lithography and mask technology : Pieter Burggraaf. Semiconductor Int. 92 (April 1985)

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 125 KB
• Volume: 26
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(86)90601-3