✦ LIBER ✦

X-ray lithography: optical's heir : Pieter S. Burggraaf. Semiconductor Int. 60 (September 1983)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Multilayer-resist lithography : Pieter S

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 134 KB

1X mask and reticle technology : Pieter

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 124 KB

X-ray lithography and mask technology :

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 125 KB