Advanced lithography for compound semiconductor applications

✍ Scribed by J. Weixlberger; P. Lindner

• Book ID: 104365971
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 222 KB
• Volume: 15
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(02)85186-9

✦ Synopsis

This paper focuses on state-of-the-art lithography technology for advanced applications in compound semiconductor material processing. The need for thinned substrate materials in high frequency as well as power devices creates new challenges in the handling of extremely fragile and costly substrates. The risk of damage is increased by the muttiple processing steps required, and again when using backside processing for vias generation. This paper describes solutions for automated lithography processing in terms of handling and prealignment technologies.