Pulsed liquid-injection MOCVD of high-K
β
C. Dubourdieu; H. Roussel; C. Jimenez; M. Audier; J.P. SΓ©nateur; S. Lhostis; L.
π
Article
π
2005
π
Elsevier Science
π
English
β 304 KB
HfO 2 and SrTiO 3 films were grown on silicon by liquid injection metal organic chemical vapour deposition. The microstructure and structure of the films were characterised by X-ray and electron diffraction, X-ray reflectometry, infrared spectroscopy, and microscopy techniques. In both cases, we emp