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Lipon thin films grown by plasma-enhanced metalorganic chemical vapor deposition in a N2–H2–Ar gas mixture

✍ Scribed by Lamartine Meda; Eleston E. Maxie

Book ID: 113937243
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 726 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.08.091

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