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Effects of thermal annealing on ZnO films grown by plasma enhanced chemical vapour deposition from Zn(C2H5)2 and CO2 gas mixtures

✍ Scribed by Zhi, Z Z; Liu, Y C; Li, B S; Zhang, X T; Lu, Y M; Shen, D Z; Fan, X W

Book ID: 111858068
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 255 KB
Volume: 36
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/36/6/314

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