✦ LIBER ✦
Comparative studies of TiN and Ti1−xAlxN by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N2/H2/Ar gas mixture
✍ Scribed by Kwang Ho Kim; Seong Ho Lee
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 726 KB
- Volume
- 283
- Category
- Article
- ISSN
- 0040-6090
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