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Lightly nitrided gate oxides for 0.25 μm CMOS

✍ Scribed by H.G. Pomp; A.E.T. Kuiper; H. Lifka; A.H. Montree; P.H. Woerlee

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 356 KB
Volume: 22
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90136-s

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