LBIC measurements of the recombining activity of dislocations in float zone silicon
β Scribed by J.L. Mariani; B. Pichaud; F. Minari; S. Martinuzzi
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 651 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0921-5107
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β¦ Synopsis
The electrical activity of dislocations has been evidenced by LBIC scanning measurements through two different distributions of dislocations for which theoretical models leading to the recombination velocity could be applied. A close experimental correlation was found between photocurrent and dislocation density. The models led to the same recombination velocity for dislocations Sd -~ 103 cm s--i. The role of oxygen and of temperature on the activity of dislocations is discussed.
π SIMILAR VOLUMES
## Investigations for the Improvement of the Radial Doping Homogeneity of Dislocation-free Floating Zone Silicon Crystals I n order t o improve the doping inhomogeneities of dislocation free F Z Silicon crystals with diameters 2 75 mm investigations were carried out t o influence the shape and cur