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Layer growth in silicon epitaxy

✍ Scribed by Jun-Ichi Nishizawa; Takeshi Terasaki; Masafumi Shimbo

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 854 KB
Volume: 13-14
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(72)90173-x

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