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Layer-by-layer etching of Cl-adsorbed silicon surfaces by low energy Ar+ ion irradiation

✍ Scribed by Bum-Jun Kim; Saehoon Chung; Sung M Cho

Book ID: 108417614
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 238 KB
Volume: 187
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00826-1

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