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Kinetics of growth of surface amorphous layers under irradiation of silicon with low-energy light ions

✍ Scribed by A. I. Titov; A. Yu. Azarov; V. S. Belyakov

Book ID: 110133906
Publisher: Springer
Year: 2003
Tongue: English
Weight: 100 KB
Volume: 37
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1561530

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