Formation of ordered helium pores in amorphous silicon subjected to low-energy helium ion irradiation

✍ Scribed by V. F. Reutov; A. S. Sokhatskii

• Book ID: 110133451
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 484 KB
• Volume: 48
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/1.1538730