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Lateral nonuniformity of effective oxide charges in MOS capacitors with Al/sub 2/O/sub 3/ gate dielectrics

✍ Scribed by Szu-Wei Huang; Jenn-Gwo Hwu

Book ID: 114618305
Publisher: IEEE
Year: 2006
Tongue: English
Weight: 228 KB
Volume: 53
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2006.875816

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