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Lateral growth of AlxGa1–xN and GaN on SiC substrates patterned by photo-electrochemical etching

✍ Scribed by Rossów, U.; Riedel, N.; Hitzel, F.; Riedl, T.; Hangleiter, A.

Book ID: 115533765
Publisher: Cambridge University Press
Year: 2002
Weight: 356 KB
Volume: 743
Category: Article
ISSN: 0272-9172
DOI: 10.1557/proc-743-l1.9

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