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Laser reactive ablation deposition of nitride films

✍ Scribed by A. Luches; G. Leggieri; M. Martino; A. Perrone; G. Majni; P. Mengucci; I.N. Mihailescu

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 322 KB
Volume: 79-80
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90417-0

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