Carbon Nitride Films Deposited on 〈111〉 Si Substrates by Reactive Excimer Laser Ablation

✍ Scribed by D'Anna, E. ;De Giorgi, M. L. ;Leggieri, G. ;Luches, A. ;Martino, M. ;Perrone, A. ;Zocco, A.

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 173 KB
• Volume: 166
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199804)166:2<581::aid-pssa581>3.0.co;2-h