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Characterization of carbon nitride films prepared by laser reactive ablation deposition

✍ Scribed by J. Zemek; A. Luches; G. Leggieri; A. Fejfar; M. Trchová

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 380 KB
Volume: 76
Category: Article
ISSN: 0368-2048
DOI: 10.1016/0368-2048(95)02398-4

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