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Excimer laser reactive ablation deposition of silicon nitride films

✍ Scribed by E. D'Anna; G. Leggieri; A. Luches; M. Martino; A. Perrone; G. Majni; P. Mengucci; R. Alexandrescu; I.N. Mihailescu; J. Zemek

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 459 KB
Volume: 86
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)00375-0

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