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Laser processing of TiSi2and CoSi2thin films on silicon (100) substrates

✍ Scribed by P. Tiwari; Mary Longo; G. Matera; S. Sharan; P. L. Smith; J. Narayan


Book ID
112819955
Publisher
Springer US
Year
1991
Tongue
English
Weight
907 KB
Volume
20
Category
Article
ISSN
0361-5235

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