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Laser approaches for deposition of carbon nitride films — chemical vapour deposition and ablation

✍ Scribed by Popov, C; Jelinek, M; Ivanov, B; Tomov, R.I; Kulisch, W

Book ID: 122845092
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 139 KB
Volume: 8
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(98)00372-0

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