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Laser based chemical vapour deposition of titanium nitride coatings

✍ Scribed by U. Illmann; R. Ebert; G. Reisse; H. Freller; P. Lorenz

Book ID
107864521
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
448 KB
Volume
241
Category
Article
ISSN
0040-6090

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The use of a thin titanium interlayer has been found to considerably improve the adhesion of titanium nitride coatings produced by physical vapour deposition (PVD). This is believed to arise from two factors: the dissolution of weak native oxide layers by the titanium (a chemical gettering effect) a