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Structure of Titanium Nitride coatings deposited by physical vapour deposition: A unified structure model

✍ Scribed by D.S. Rickerby; A.M. Jones; A.J. Perry

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
965 KB
Volume
36
Category
Article
ISSN
0257-8972

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The use of a thin titanium interlayer has been found to considerably improve the adhesion of titanium nitride coatings produced by physical vapour deposition (PVD). This is believed to arise from two factors: the dissolution of weak native oxide layers by the titanium (a chemical gettering effect) a