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Laser annealing of amorphous carbon films

✍ Scribed by E. Cappelli; C. Scilletta; S. Orlando; V. Valentini; M. Servidori

Book ID: 108063797
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 1024 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.10.062

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